纳米级膜厚精密测量的SPR方法研究

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摘要

根据表面等离子体震荡的特性及原理，本课题主要是对根据实际实验要求及

标准情况所设计的纳米级金属膜厚在线精密测量系统进行研究，以达到精确测量

10 纳米内的金属薄膜厚度的目的。

本文首先介绍了 SPR 精密测量技术的发展及应用，从理论上对表面等离子体

的产生，表面等离子体共振的产生条件以及表面等离子体波的激发等原理进行阐

述与讨论，得出在线测量系统所选用的 SPR 模型。其次是根据实验的实际条件对

金属材料以及测量系统的搭建进行设计对比与选取，并利用系统自定位角度、比

对数据库建立以及曲线标记匹配等技术进行整个测量系统的确定与研究。利用标

准二维 CCD 进行动态光强信号的采集，并采用短波通信和调制解调技术对信号进

行传递，通过计算机对所采集的数据进行数据处理。最后对课题所检测的数据进

行分析和多种方法相结合的观念进行噪声的剔除、运动补偿滤波进行图像的修复

与再现、剔除由于仪器或者环境的影响造成的粗大误差，提高了整个系统的检测

精度，并与数据库中的数据曲线和理论曲线分别进行对比，得出 10nm 以下的纳米

级金属薄膜测量结果。

本文对 SPR 在金属薄膜的在线测量研究奠定一定的基础，并提高了 SPR 在金

属薄膜领域中的测量精度。

关键词：表面等离子体共振（SPR）纳米级金属膜厚精密测量

ABSTRACT

According to the characteristics and principle of surface plasma oscillation, this

paper mainly research the accurate measurement method of SPR for nanometer metal

film. According to the experimental requirements and standards for designing thickness

online measurement system,in order to achieve accurate measure metal film thickness

below 10nm.

This paper firstly introduces the development and application of SPR precision

measurement technology, we discuss the generating conditions of surface plasmon

resonance excitation and surface plasmon generation principle by theory, and chose the

line measurement system of the SPR model. Secondly,we design and compare the metal

lic materials and structures measuring system according to the actual conditions of the

experiment, besides we use the system auto-positioning angle and compare the database

and curve tag matches to research the entire measurement system determines. Using

standard two-dimensional CCD to acquire the dynamic light intensity signal, using the

modulation and demodulation techniques to transmit the signal and to process the

collected data by the computer. Finally, analyzing the detected data and removing noise

which combined a variety of methods,restorating signal by motion compensation filter

and reproduction of the image, besides,removing the the coarse error caused by the in

strument or the environmental impact, and improving the overall system detection

accuracy, and comparing the database data curve with the theoretical curve and draw

the the nanoscale measurement result of the metal thin film in the 10 nm or less.

It is believed that the work of the thesis will make contribution to SPR in the

metal thin film online measurement and improve the measurement accuracy of the

SPR in the area of metal thin film

Key Word: SPR, nanoscale , Metal -film thickness, Precision measurement

中文摘要

ABSTRACT

第一章绪论 ···································································································· 1

1.1 概述 ······································································································ 1

1.2 SPR（Surface Plasmon Resonance）金属膜厚测量技术 ·························· 1

1.3 课题研究的意义及内容 ··········································································· 2

1.3.1 课题研究的主要内容 ········································································ 3

1.3.2 课题研究的主要关键技术 ································································· 4

第二章表面等离子共振原理 ············································································ 5

2.1 光的反射与折射 ····················································································· 5

2.1.1 基本原理 ························································································· 5

2.1.2 光的全反射 ····················································································· 6

2.2 金属对光的折射与反射 ··········································································· 7

2.3 等离子体震荡 ························································································ 8

2.4 等离子体波 ···························································································· 9

2.5 表面等离子体共振 ················································································· 10

2.5.1 消逝波与衰减全反射 ······································································· 10

2.5.2 表面等离子体波共振的产生条件 ····················································· 11

2.5.3 表面等离子体波的激发 ··································································· 12

2.6 本章小结 ······························································································ 13

第三章纳米级金属膜厚在线测量系统研究 ······················································ 14

3.1 Kretschmann 结构模型··········································································· 14

3.1.1 Kretschman 结构模型工作原理 ························································ 14

3.2 纳米级金属膜厚的在线测量系统 ···························································· 16

3.3 在线测量系统的主要关键点 ··································································· 18

3.3.1 金属材料的选取 ·············································································· 18

3.3.2 系统角度自定位 ·············································································· 20

3.3.3 棱镜与镀膜玻璃基底之间的匹配处理技术 ········································ 21

3.3.4 金属薄膜蒸镀工艺要求 ··································································· 22

3.3.5 数据比对及曲线匹配的数据库建立 ·················································· 23

3.3.6 CCD 获取视频信号的无线传输 ·························································· 25

3.4 实验研究 ······························································································ 27

3.5 本章小结 ······························································································ 28

第四章数据处理与分析 ·················································································· 29

4.1 数据处理的目的 ····················································································· 29

4.2 视频信号滤波处理 ················································································· 29

4.2.1 滑动平均滤波 ················································································· 31

4.2.2 小波分析 ························································································ 32

4.2.3 时域滤波 ························································································ 34

4.3 金属薄膜的厚度计算法 ·········································································· 35

4.3.1 极值法 ··························································································· 36

4.3.2 粗大误差处理 ················································································· 36

4.4 本章小结 ······························································································ 39

第五章论文总结与展望 ·················································································· 40

5.1 论文总结 ······························································································ 40

5.2 存在的问题与展望 ················································································· 40

参考文献 ········································································································ 41

在读期间公开发表的论文和承担科研项目及取得成果 ······································· 44

致谢 ············································································································· 45

第一章绪论

1.1 概述

英国著名物理学家开尔文曾今说过：“当你能够测量你所关注的事物，而且

能够用数量来描述它的时候，你就对其有所认识；当你不能测量它，也不能将其

量化的时候，你对它的了解就是贫乏和不深入的。”前苏联著名科学家门捷列夫

曾今说过：“从开始有测量的时候起，才开始有科学”。随着测量技术的不断发

展与创新，测试计量技术被广泛应用于各个领域，本文所提出的基于SPR（Surface

Plasmon Resonance）方法的纳米级金属膜厚在线精密测量系统便是在物理光学的

精密仪器与SPR测量技术相结合的前提下产生，主要目的是为了提高测量金属薄膜

厚度的精确度。

1.2 SPR（Surface Plasmon Resonance）金属膜厚测量技术

SPR测量，是指利用表面等离子共振（SPR）技术即表面等离子共振技术检测

金属绝缘体界面传播的电子密度波动[1]。从定义上说就是指当分析物与金属表面的

生物分子识别膜相互作用时，就会引起金属表面折射率发生变化，从而导致SPR

角度发生变化，通过对SPR角度的测量，可以获得被测物的浓度、亲和力、动力学

常数、特异性等信息[2]。

表面等离子共振（SPR）技术是一种具有高分辨率、高灵敏度、抗电磁干扰能

力强等特点的新型光电检测技术，并且广泛应用于微量物质的检测以及测量[3]。表

面等离子共振主要是由光波入射到三层介质模型中时与金属薄膜表面的自由电子

相互作用产生，在金属薄膜的表面产生的等离子体共振现象，利用入射光在玻璃

界面处发生内全反射时的消逝波，引发金属表面的自由电子在金属介质界面传播

的表面等离子体波[4]。在入射角或波长为某一适当值的条件下，表面等离子体波与

消逝波的频率和波矢相等，二者将发生共振，也就是所谓的表面等离子振荡[5]。

随着表面等离子共振现象（SPR）的出现以及SPR技术的发展，SPR传感技术

逐渐应用于金属薄膜的纳米级测量[6]。20世纪初期，Wood首先在实验中发现连续

光谱的偏振光照射金属光栅时会出现表面等离子的共振现象[7]。1957年Ritchie发现，

当电子穿过金属薄片时存在数量的消失峰，称之为能量降低的等离子模式，指出

了该模式与薄膜边界的关系，第一次提出了描述金属内部电子密度纵向波动的金

属等离子体概念。1958年，Turbader利用金属薄膜的全反射激励的方法，观察到表

面等离子体的共振现象[8]。1959年，Powell和Swan利用实验证实了金属等离子的概

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摘要：

摘要根据表面等离子体震荡的特性及原理，本课题主要是对根据实际实验要求及标准情况所设计的纳米级金属膜厚在线精密测量系统进行研究，以达到精确测量10纳米内的金属薄膜厚度的目的。本文首先介绍了SPR精密测量技术的发展及应用，从理论上对表面等离子体的产生，表面等离子体共振的产生条件以及表面等离子体波的激发等原理进行阐述与讨论，得出在线测量系统所选用的SPR模型。其次是根据实验的实际条件对金属材料以及测量系统的搭建进行设计对比与选取，并利用系统自定位角度、比对数据库建立以及曲线标记匹配等技术进行整个测量系统的确定与研究。利用标准二维CCD进行动态光强信号的采集，并采用短波通信和调制解调技术对信号进行传递...

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