光子晶体传感器特性研究

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摘要
光子晶体是一种按照晶体的结构对称性制备的周期性介电结构材料，其光子
禁带可以用来人为控制光在光子晶体中的传输。此特性赋予光子晶体光电器件比
传统光电器件所不具有的优势。基于光子晶体的传感器件与传统光电传感器相比，
具有响应速度更快、更准确、操作简便、体积更小等优点，使得光子晶体传感器
适合将来集成光学元件的发展方向。鉴于此，本文针对一维光子晶体的温度传感
特性以及二维光子晶体缺陷波导耦合型传感器进行了研究。
我们从理论上研究了一维光子晶体的各种特性，讨论了由硅和二氧化硅材料
组成的一维光子晶体中各个结构参数对光子晶体中光子禁带的影响，我们还研究
了一维光子晶体中缺陷模的特性，研究了各个参数对缺陷模的影响，并重点研究
了缺陷模随温度变化特性。基于理论研究结果，设计并制作了一种新型基于一维
光子晶体缺陷模的光纤温度传感器。测试结果证明：温度传感器测量范围为 0-130
摄氏度，温度测量精度<1℃。
我们还在理论上利用时域有限差分法（FDTD），讨论了六角和正方形两种常
见排列结构二维光子晶体的结构特性，以及光子晶体中各个参数对光子晶体特性
的影响。之后对二维光子晶体中线缺陷波导特性进行了多方面研究，其中包括：
对六角和正方晶格二维光子晶体中线型缺陷波导的光传输机耦合特性进行模拟，
得到不同光子晶体背景折射率时光在波导中的传输特性。讨论了两种晶格结构二
维光子晶体波导耦合的结构、耦合的变化特性。最终选择适合的线型缺陷长度可
以实现光能量在波导之间耦合交替传输。
基于上述理论研究结果，我们设计了一种基于正方晶格二维光子晶体平行波
导对的流体折射率探测器，并用 FDTD 及平面波展开法对其禁带及光传输特性进
行了研究。该探测器可以实现光子晶体中基底介质折射率与平行波导对输出光波
能量之间的相互测量。计算结果表明：适合的耦合长度与平行波导对间距，可以
通过波导对输出光能量变化可实现对二维光子晶体背景折射率即填充流体折射率
的快速准确探测，有效探测折射率范围从 1.33-1.48。另外我们还设计了一种基于
液晶填充六角晶格二维光子晶体平行波导对的可调谐光功率分配器，并用 FDTD
和平面波展开法对其禁带及光传输进行了研究。计算结果表明：通过调节填充液
晶的控制电压，可以调节光子晶体平行波导对的输出光能量分布，实现对光功率
输出分布任何比例的调谐。
关键字：光子晶体 时域有限差分法（FDTD） 耦合波导 流体折射率
探测器 可调谐光功分器
ABSTRACT
Photonic crystal (PC) is Periodicity micro-structure dielectric material, it’s photonic
band gap can be used to control light transmission artificially. And which makes
optoelectronic devices have many advantages than conventional kinds, for example
higher speed, higher accurate, easy to operate, smaller size and so on. All these shows
that photonic crystal device will be the research and development trend of integrate
optoelectronic devices. In this paper, we focus on study sensors based on 1D and 2D
photonic crystal coupling waveguides:
1D photonic crystal was studied in theory by Finite difference time domain method
(FDTD). Relation between the parameters of 1D photonic crystal which is made by
silicon and SiO2 and it’s photonic band structure were studied. Character of defect mode
in 1D PC was also studied, and temperature characters of defect mode was studied in
emphasize. A new fiber temperature detector which is based on 1D PC defect mode was
proposed and crate. Test result of the temperature detector were shows below: detect
range:0-130℃, precision: <1℃.
Finite difference time domain method (FDTD) and Plane Wave Expansion Method
(PWE) were used to analyze structure character of hexagonal and cubic lattice two
dimensional PC and its changing features caused by parameters of photonic crystal.
Characters of line defect waveguide in 2D PC were also studied, including: Simulation
of coupling features of line defect waveguide in 2D PC with hexagonal and cubic lattice
were made, and light coupling characters in different background index of PC were
obtained. PC waveguide, in two different lattice structures, coupling structure and
coupling changing features were studied, a suitable length of line defect waveguide can
realize light coupling between waveguides and transmit forwards alternately was chosen.
New structure of coupler was designed aim at detection of background index of 2D
PC and output light power of coupler, and different demand can be achieved by modify
structure and parameters of PC coupler.
Based on research above, a liquid refractive index detector based on two parallel
line waveguides in 2D PC with cubic lattice was designed. Its photonic band gap and
light transmitting feature were studied by FDTD and PWE. Research shows: with
suitable coupling length and spacing, the device can detect liquid refractive index which
was used as background material in 2D LC by detecting two waveguides’ output optical
power. A tunable optical power splitter based on 2D hexagon liquid crystal filled PC
was proposed. Its photonic band gap and light transmitting feature were studied by
FDTD and PWE. Research presents that optical output of two coupling waveguides can
be modified by change LC control voltage.
Keywords: photonic crystal, FDTD, waveguide, liquid refractive index
detector, Tunable optical power splitter
目录
摘要
ABSTRACT
第一章 绪论·························································· 1
§1.1 论文的研究背景··············································· 1
§1.2 光子晶体的基本概念及性质····································· 2
§1.2.1 光子晶体的基本概念······································· 2
§1.2.2 光子晶体的基本性质······································· 3
§1.3 光子晶体传感器的研究进展····································· 4
§1.3.1 光子晶体光纤传感器······································· 4
§1.3.2 光子晶体表面波传感器····································· 5
§1.3.3 光子晶体多孔硅传感器····································· 6
§1.3.4 二维光子晶体微腔传感器和波导传感器······················· 7
§1.3.5 光子晶体传感器存在的问题·································· 8
§1.4 论文的主要内容和安排·········································· 8
第二章 光子晶体理论模型及研究方法··································· 10
§2.1 电磁场 Maxwell 方程组········································ 10
§2.2 平面波展开法（PWE）·········································· 11
§2.3 时域有限差分法（FDTD）······································· 12
§2.3.1 FDTD 在模拟光波导方面的优势和进展······················· 12
§2.3.2 二维情况下的 FDTD······································· 13
§2.4 吸收边界条件················································· 14
§2.5 本章小结···················································· 15
第三章 基于正方晶格二维光子晶体线波导的流体折射率探测器·············16
§3.1 正方晶格二维光子晶体的基本特性····························· 16
§3.1.1 正方晶格二维光子晶体结构······························· 16
§3.1.2 二维光子晶体光子禁带特征······························· 17
§3.1.3 光子晶体介质填充比对光子禁带的影响····················· 18
§3.1.4 光子晶体中基底介质折射率变化对光子禁带的影响··········· 21
§3.2 正方晶格二维光子晶体中线缺陷波导特性研究··················· 22
§3.3 光子晶体波导耦合器········································· 23
§3.3.1 光子晶体平行波导间隔与波导耦合周期的关系················ 24
§3.3.2 硅柱半径对二平行波导耦合周期的影响······················ 25
§3.3.3 基底介质折射率与平行波导对光波耦合周期的关系············ 26
§3.4 流体折射率探测器设计与优化·································· 27
§3.4.1 流体折射率探测器结构设计······························· 27
§3.4.2 FDTD 方法对三种流体折射率探测器结构模拟研究············ 28
§3.4.3 流体折射率探测器结构优化设计··························· 31
§3.5 流体折射率探测器 FDTD 模拟实验结果分析······················· 32
§3.6 实验结果验证················································ 33
§3.7 本章小结···················································· 33
第四章：液晶填充二维光子晶体可调谐光功率分配器设计与研究············· 34
§4.1 液晶填充光子晶体············································ 34
§4.1.1 液晶简介················································ 34
§4.1.2 液晶填充光子晶体特性分析································ 35
§4.2 二维六角晶格结构光子晶体光子禁带特性研究···················· 36
§4.2.1 二维六角晶格结构光子晶体································ 36
§4.2.2 硅柱半径对光子禁带的影响································ 36
§4.2.3 光子晶体基底介质折射率对光子禁带的影响·················· 37
§4.3 二维六角晶格结构光子晶体平行波导耦合器······················ 38
§4.3.1 平行波导耦合器结构······································ 38
§4.3.2 波导对间隔对波导光波耦合周期的影响······················ 39
§4.3.3 硅柱半径对波导光波耦合周期的影响························ 40
§4.3.4 光子晶体基底介质折射率对波导光波耦合周期的影响·········· 42
§4.4 液晶填充二维六角晶格光子晶体可调谐光功率分配器设计与研究···· 43
§4.4.1 可调谐光功率分配器结构·································· 43
§4.4.2 FDTD 方法对可调谐光功分器模拟研究······················· 43
§4.4.3 可调谐光功分器结构优化设计及结果分析···················· 45
§4.5 可调谐光功分器结果分析······································ 46
§4.6 本章小结···················································· 49
第五章 基于一维光子晶体缺陷模的光纤温度传感器设计···················50
§5.1 光纤温度传感器概述·········································· 50
§5.2 一维光子晶体结构及禁带特性·································· 51
§5.2.1 一维光子晶体结构········································ 51
§5.2.2 一维光子晶体禁带········································ 52
§5.2.3 锗层厚度与硅折射率变化对光子禁带的影响·················· 53
§5.3 一维光子晶体缺陷模结构及特性······························· 54
§5.3.1 一维光子晶体缺陷模结构································· 54
§5.3.2 正常结构一维光子晶体透射光谱··························· 54
§5.3.3 缺陷模厚度与透射峰波长关系····························· 55
§5.3.4 温度变化与特定波长透射光透射功率的关系·················· 57
§5.4 基于一维光子晶体缺陷模的温度传感元件设计··················· 57
§5.5 基于一维光子晶体的温度传感元件的制作与测试················· 58
§5.5.1 温度传感与元件的制作···································58
§5.5.2 温度传感器温度传感测试································· 60
§5.5.3 温度传感器测试结果与分析································ 61
§5.6 本章小结···················································· 62
第六章 结论与展望··················································· 63
参考文献···························································· 66
在读期间公开发表的论文及申请的专利以及承担科研项目并取得的成果······70
致谢································································71
第一章 绪论
1
第一章 绪论
本章对论文的研究背景及意义进行概述，主要包括以下几个方面：1、光子晶
体的研究现状及发展前景；2、基于光子晶体传感器的研究进展并指出光子晶体传
感器是未来集成光学器件研究发展的热门方向；3、简要介绍本文研究的主要内容
及安排。
1.1 论文的研究背景
随着科学技术的飞速发展，光子相较于电子具有更高的传输速度和更大的信息
容量，并且光子之间没有电子之间存在的相互作用，集成度更高[1],光子作为新一
代信息传输媒介越来越受到当今各国的重视。也正因为上述原因，光电器件替代
电子器件，集成光路替代集成电路几乎成了必然选择。而作为新兴光子材料----光
子晶体也受到越来越多的关注。
1987 年，Yablonovitch[2]和John[3]最先提出了光子晶体的概念.光子晶体是一种
由多种介电材料在空间具有周期性排列的“人工晶体”。类似于半导体材料中，具
有周期性电势场的原子晶格结构使电子形成禁带结构。光子晶体中可以产生光子
禁带，频率位于光子禁带中的电磁波由于受到周期性电介质材料强烈的布拉格衍
射，而导致其不能在光子晶体中传播。光子禁带特性是光子晶体的重要特征,利用
此特性可以制作多种光子器件比如光功分器、光开关以及光传感器等。这也成为
了当今光子晶体的重要研究和应用方向。
Wendt等人在1993年时利用电子束直写和反应离子束刻蚀方法在 GaAs基片薄
膜（平板光子晶体）[4]制作出了光子晶体。这种技术所使用时间很少，但是有一个
缺点，就是不能进行曝光量修正。Krauss 等人则利用多点曝光技术和反应离子束
刻蚀技术制备了 GaAs 基光子晶体[5] ,该光子晶体为世界上第一个光学尺寸上的一
维光子晶体。他成功为光子晶体制作开辟了一条新道路，即利用已有的半导体工
业技术来制造半导体材料的光子晶体。之后大部分光子晶体的制备都是基于相类
似的技术[6]。
随着光子晶体制备技术的逐渐发展与成熟，基于光子晶体的光子器件的研究也
迅速的开展了起来。2002 年，Zhang 等人提出利用类似于低频滤波器形式的光子
晶体波分复用器件，可以实现无反射的波分复用器[7]。光束分束器，Mach-Zender
干涉仪等也可以由光子晶体中各种波导和点缺陷构成。而自从 2002 年制作出第一
个光子晶体光纤耦合器[8]，光子晶体光纤传感器也成为了近年来研究的热门领域。
摘要：

摘要光子晶体是一种按照晶体的结构对称性制备的周期性介电结构材料，其光子禁带可以用来人为控制光在光子晶体中的传输。此特性赋予光子晶体光电器件比传统光电器件所不具有的优势。基于光子晶体的传感器件与传统光电传感器相比，具有响应速度更快、更准确、操作简便、体积更小等优点，使得光子晶体传感器适合将来集成光学元件的发展方向。鉴于此，本文针对一维光子晶体的温度传感特性以及二维光子晶体缺陷波导耦合型传感器进行了研究。我们从理论上研究了一维光子晶体的各种特性，讨论了由硅和二氧化硅材料组成的一维光子晶体中各个结构参数对光子晶体中光子禁带的影响，我们还研究了一维光子晶体中缺陷模的特性，研究了各个参数对缺陷模的影响，...

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